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直播回放 | 光斑尺寸可調(diào)的高均勻性線光斑半導(dǎo)體激光器系統(tǒng)

Time:2023-09-18

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2023年9月21日周四19:30,炬光科技光機(jī)系統(tǒng)技術(shù)專家華大成在光電匯直播平臺(tái)“光言萬(wàn)物”發(fā)表題為《光斑尺寸可調(diào)的高均勻性線光斑半導(dǎo)體激光器系統(tǒng)》的專題演講。

報(bào)告摘要

晶圓激光退火(Wafer Laser Annealing)是28nm及以下邏輯芯片制造前道工序中不可缺少的關(guān)鍵工藝之一。該工藝采用近紅外波段半導(dǎo)體激光光源,通過(guò)多組不同功能的激光光學(xué)整形系統(tǒng)及光學(xué)勻化系統(tǒng),在工作距離下達(dá)成12mm*70μm的極窄線激光光斑,將形成的高能量密度極窄激光光斑照射到晶圓表面,在不到1毫秒的時(shí)間內(nèi)將表層原子層加熱到1000°C以上再急速冷卻,使晶圓表面局部形成超淺結(jié)和高激活結(jié),從而有效減少前道工序中產(chǎn)生的晶圓電極缺陷,提高產(chǎn)品性能,提升晶圓生產(chǎn)良品率。

炬光科技推出的DLight?S系列半導(dǎo)體集成電路晶圓退火系統(tǒng),結(jié)合產(chǎn)生光子的共晶鍵合技術(shù)、激光光源熱管理技術(shù)、熱應(yīng)力控制技術(shù)以及調(diào)控光子的激光光束轉(zhuǎn)換技術(shù)和光場(chǎng)勻化技術(shù),產(chǎn)生一條長(zhǎng)寬比達(dá)160:1的近紅外波段極窄線光斑,并在光斑長(zhǎng)度方向達(dá)到>95%的能量均勻性和>98%的能量穩(wěn)定性。應(yīng)用在半導(dǎo)體前道工序中的多種退火工藝。

DLight?S系列半導(dǎo)體集成電路晶圓退火系統(tǒng)

演講人信息

華大成,浙江大學(xué)光學(xué)工程碩士畢業(yè),光機(jī)系統(tǒng)技術(shù)專家,2019年加入炬光科技,長(zhǎng)期從事高精密線光斑激光系統(tǒng)開(kāi)發(fā)工作。

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